 |
System
Configuration |
|
|
| Dimension |
1860
x 797 x 2500 (W x D x H) |
|
| Non-contacting
high pressure washing stations
1&4 using DIW Knife
mechanism. |
|
| 3
or more kinds of chemicals
can be used individually. |
|
| Both-sides-contacting
type stations 2&3 using
roll-type PVA brush. |
|
High
reliability drying system
by 5 grip and nitrogen
injection type high speed
rotation. |
|
| High
unit productivity provided
by 3 or more washing systems
and elimin-ation of SRD
bottle-neck problem (washing
time by station can be reduced,
80 wafers/hr) |
|
