|
|
   |
|
| |
 |
 |
|
 |
System Specification |
|
|
| Application |
OLED |
|
| Substrate Size |
370 x 470 (mm) |
|
Glass Handling
|
Holderless Type |
|
| System TACT |
4Min |
|
| Continuous Operating Time |
|
|
| Alignment Accuracy |
≤ ± 3 ㎛ (CCD Alignment) |
| - Fine mask |
|
|
| Uniformity |
|
| - Organic Layer |
≤ ± 5% |
| - Metal Layer |
≤ ± 5% |
|
| System Size |
32,300 L x 4,900 W x 2,700 H (mm) |
|
|
|
|
|
|
|
|
|
|
