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System Specification |
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| Application |
OLED (LITI) |
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| Substrate Size |
730 x 920 (mm) |
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Glass Handling
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Holderless Type |
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| Film Handling |
Holder Type |
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| Alignment Accuracy |
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| - Open Mask |
≤ ± 50 ㎛ (CCD Alignment) |
| - Fine mask |
≤ ± 200 ㎛ (Pre Alignment) |
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| Uniformity |
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| - Organic Layer |
≤ ± 5% |
| - Metal Layer |
≤ ± 5% |
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System Specification |
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| Application |
OLED, PLED |
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| Substrate Size |
730 x 920 (mm) |
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Glass Handling
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Holderless Type |
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| Alignment Accuracy |
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| - Open mask |
≤ ± 200 ㎛ (Pre Alignment) |
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| Uniformity |
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| - Organic Layer |
≤ ± 5% |
| - Metal Layer |
≤ ± 5% |
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