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System Specification |
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| Application |
OLED |
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| Substrate Size |
620 x 750, 730 x 920,
1,100 x 1,300 (mm) |
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Glass Handling
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Holderless Type |
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| Organic Source |
L2PS (Linear Like Point Source),
Valved Source |
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| Alignment Accuracy |
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| - Open mask |
≤ ± 20 ㎛ (CCD Alignment) |
| - Fine mask |
≤ ± 5 ㎛ (CCD Alignment) |
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| Uniformity |
≤ ± 3% |
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| Material Usage |
≥ 50% |
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