|
|
|
|
 |
| |
| |
 |
|
 |
System
Configuration |
|
|
| Inner
Quartz Diameter |
40m
~ 180m |
|
| Heating
Zone |
7
Zones(Independent Heating Control) |
|
| Exhaust
Cooling |
LN2
Trap |
|
| Organic
Flow Method |
N2
Flow by M.F.C |
|
| Heating
Control Range |
Max
600 ℃ |
|
| Ultimate
Vacuum |
5
X 10-6 Torr |
|
| Heating
Insulation |
Ceramic
Zone |
|
|
|
| |
|
|
|
|
|
|
|
|
 |
|
pulldown_menu
|
|
|
 |
    |
 |
|
|
